EXMATEC 2012 OPTICAL STUDIES ON HOMOEPITAXIAL AlN
نویسندگان
چکیده
Recently, AlN bulk crystals with very high crystal quality have become available in diameters up to 25 mm. Metalorganic vapor phase epitaxy (MOVPE) allows to grow either very pure homoepitaxial AlN layers, or layers with controlled silicon (n-type) doping. We investigated such layers by low-temperature photoluminescence (PL), reflectance, and ellipsometry. We find very narrow lines, which allow a clear identification of the spectral features related to different free and bound exciton states, and to the multiple valence bands.
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